Old Web
English
Sign In
Acemap
>
authorDetail
>
Erin Joy Capdos Tinacba
Erin Joy Capdos Tinacba
Osaka University
Materials science
Ion
Reactive-ion etching
Analytical chemistry
Etching (microfabrication)
3
Papers
4
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Surface damage formation during atomic layer etching of silicon with chlorine adsorption
2021
Journal of Vacuum Science and Technology
Erin Joy Capdos Tinacba
Michiro Isobe
Satoshi Hamaguchi
Show All
Source
Cite
Save
Citations (0)
1