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Theodore S. Moise
Theodore S. Moise
Dry etching
Etching
Etching (microfabrication)
Reactive-ion etching
Composite material
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A method for cleaning after etching
2001
Mirkarimi Laura Wills
Stephen R. Gilbert
Guoqiang Xing
Scott R. Summerfelt
Tomoyuki Sakoda
Theodore S. Moise
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