Old Web
English
Sign In
Acemap
>
authorDetail
>
Kazuhiro Komori
Kazuhiro Komori
Electronic engineering
Wafer
Engineering
cycle time
Parametric statistics
2
Papers
14
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Process integration of single-wafer technology in a 300-mm fab, realizing drastic cycle time reduction with high yield and excellent reliability
2003
IEEE Transactions on Semiconductor Manufacturing
Shuji Ikeda
Kazunori Nemoto
Michimasa Funabashi
Toshiyuki Uchino
Hirohiko Yamamoto
Noriyuki Yabuoshi
Yasushi Sasaki
Kazuhiro Komori
Norio Suzuki
Shinji Nishihara
Shunji Sasabe
Atsuyoshi Koike
Show All
Source
Cite
Save
Citations (10)
Innovation of 300 mm fab manufacturing with single wafer technology
2001
IEDM | International Electron Devices Meeting
C. Chen
T. Lin
J. Jung
Noriyuki Yabuoshi
Y. Sasaki
Kazuhiro Komori
Hsueh Hao Shih
Chao Min Liao
Michimasa Funabashi
Norio Suzuki
Y. Ishii
Toshiyuki Uchino
Kazunori Nemoto
Hideaki Yamamoto
S Nishihara
S. Sasabe
Atsuyoshi Koike
Shuji Ikeda
J. Tsao
Show All
Source
Cite
Save
Citations (4)
1