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Robert J. San Jose Chiu
Robert J. San Jose Chiu
Gate dielectric
Dielectric
Plasma-enhanced chemical vapor deposition
Silicide
Substrate (electronics)
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Sidewall spacers with low stress in integrated circuit technology
2004
Paul R. Besser
Simon S. Chan
Robert J. San Jose Chiu
Paul L. King
Minh-Van Ngo
Errol Todd Ryan
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