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Siegfried Nau
Siegfried Nau
Fraunhofer Society
Piezoelectric accelerometer
Piezoresistive effect
Control engineering
Microelectromechanical systems
Accelerometer
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Design of a 1D and 3D monolithically integrated piezoresistive MEMS high-g accelerometer
2014
Robert Kuells
Matthias Bruder
Siegfried Nau
Manfred Salk
Klaus Thoma
Walter Hansch
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