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Tsuyosi Kachi
Tsuyosi Kachi
Copper interconnect
Threshold voltage
Fabrication
cmos fabrication
Electrical engineering
2
Papers
1
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0
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A Compact FD-SO1 MOSFETs Fabrication Process Featuring Si,Ge,-, Gate and Damascene-Dummy SAC
2000
Symposium on VLSI Technology
Digh Hisamoto
Tsuyosi Kachi
S. Tsujikawa
Akihiro Miyauchi
Kikuo Kusukawa
Noriyuki Sakuma
Yoshio Homma
Natsuki Yokoyama
Fumio Ootsuka
Takahiro Onai
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A compact FD-SOI MOSFETs fabrication process featuring Si/sub x/Ge/sub 1-x/ gate and damascene-dummy SAC
2000
VLSIT | Symposium on VLSI Technology
Digh Hisamoto
Tsuyosi Kachi
Shinpei Tsujikawa
Akihiro Miyauchi
Kikuo Kusukawa
Noriyuki Sakuma
Yoshio Homma
Natsuki Yokoyama
Fumio Ootsuka
Takahiro Onai
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