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Masatoshi Tsuji
Masatoshi Tsuji
Toshiba
UV curing
Optics
Coating
Electron-beam lithography
Nanoimprint lithography
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The opportunity and challenge of spin coat based nanoimprint lithography
2017
Proceedings of SPIE
Wooyung Jung
Jungbin Cho
Eunhyuk Choi
Yonghyun Lim
Cheol-Kyu Bok
Masatoshi Tsuji
Kei Kobayashi
Takuya Kono
Tetsuro Nakasugi
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