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Thomas Vavul
Thomas Vavul
KLA-Tencor
Reticle
Photolithography
Computer vision
Engineering drawing
Phase-shift mask
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Critical Dimension Uniformity using Reticle Inspection Tool
2009
Mark Wylie
Trent Hutchinson
Gang Pan
Thomas Vavul
John Miller
Aditya Dayal
Carl Hess
Mike Green
Shad Hedges
Dan Chalom
Maciej Rudzinski
Craig Wood
Jeff McMurran
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