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Jiewen Deng
Jiewen Deng
National University of Singapore
Control theory
Semiconductor device fabrication
Control engineering
Thin film
Photoresist
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Control of photoresist film thickness: Iterative feedback tuning approach
2006
Computers & Chemical Engineering
Arthur Tay
Weng Khuen Ho
Jiewen Deng
Boon-Keng Lok
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Citations (14)
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