Old Web
English
Sign In
Acemap
>
authorDetail
>
Chang Jin Park
Chang Jin Park
Ajou University
Biasing
Analytical chemistry
Plasma
Ion
Voltage
1
Papers
6
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Angular dependences of SiO2 etch rates at different bias voltages in CF4, C2F6, and C4F8 plasmas
2017
Thin Solid Films
Jun-Hyun Kim
Sung-Woon Cho
Chang Jin Park
Heeyeop Chae
Chang-Koo Kim
Show All
Source
Cite
Save
Citations (6)
1