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M. Spadafora
M. Spadafora
University of Catania
Epitaxy
Analytical chemistry
Oxide
Thermal oxidation
Inorganic chemistry
4
Papers
80
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Dry oxidation of MBE-SiGe films: rate enhancement, Ge redistribution and defect injection
2005
Materials Science in Semiconductor Processing
M. Spadafora
A. Terrasi
S. Mirabella
A. M. Piro
M. G. Grimaldi
S. Scalese
E. Napolitani
M. Di Marino
D. De Salvador
A. Carnera
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Citations (11)
Silicon interstitial injection during dry oxidation of SiGe∕Si layers
2005
Journal of Applied Physics
E. Napolitani
M. Di Marino
D. De Salvador
A. Carnera
M. Spadafora
S. Mirabella
A. Terrasi
S. Scalese
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Citations (18)
Oxidation rate enhancement of SiGe epitaxial films oxidized in dry ambient
2003
Applied Physics Letters
M. Spadafora
Giuseppe Privitera
A. Terrasi
S. Scalese
C. Bongiorno
A. Carnera
M. Di Marino
E. Napolitani
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Citations (30)
Rapid thermal oxidation of epitaxial SiGe thin films
2002
Materials Science and Engineering B-advanced Functional Solid-state Materials
A. Terrasi
S. Scalese
R Adorno
E Ferlito
M. Spadafora
E. Rimini
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Citations (21)
1