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taguti yosio
taguti yosio
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ECR型イオン源を用いたダイヤモンド(100)面の酸素イオンビーム加工 (第1報) 加工速度のイオン入射角依存性について
1994
kiyohara syuuzi
miyamoto iwao
morita hisayuki
taguti yosio
yosida miti yo
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