Old Web
English
Sign In
Acemap
>
authorDetail
>
Kazutaka Takaki
Kazutaka Takaki
Toshiba
Analytical chemistry
Reactive-ion etching
Plasma etching
Inorganic chemistry
Chemistry
1
Papers
3
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Low-Damage SF6 Plasma-Etching Condition for Planar GaN HEMTs
2009
Journal of The Electrochemical Society
Jeoungchill Shim
Akio Miyao
Hiroyuki Sakurai
Keiichi Matsushita
Ken Onodera
Kazutaka Takaki
Hisao Kawasaki
Show All
Source
Cite
Save
Citations (3)
1