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Hirohisa Yamazaki

Hitachi

4

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9

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Theoretical Screening of Candidate Materials for DRAM Capacitors and Experimental Demonstration of a Cubic-Hafnia MIM Capacitor

2010 IEEE Transactions on Electron Devices
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Scalability of TiN/HfAlO/TiN MIM DRAM capacitor to 0.7-nm-EOT and beyond

2009 IEDM | International Electron Devices Meeting
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Productivity improvement for a Zr-base high-k film deposition using thermal chamber cleaning technique

2008 ISSM | International Symposium on Semiconductor Manufacturing
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Steady and Transient Gas Flow Simulation of SiGe Vertical Reactor

2003
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Citations (1)