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F. Verjus
F. Verjus
NXP Semiconductors
Q factor
Electronic engineering
Thin film
Sputter deposition
Resonator
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Piezoelectric aluminum nitride resonator for reference oscillator
2008
FCS | International Frequency Control Symposium
F. Verjus
Aurélien Fougerat
J. Rousseard
F. Le Cornec
Sébastien Loiseau
Laurie Valbin
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