Old Web
English
Sign In
Acemap
>
authorDetail
>
Chang Reol Kim
Chang Reol Kim
SK Hynix
Engineering
Materials science
Error detection and correction
Optical proximity correction
Photolithography
3
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Nano Probe Analysis of Device Characteristics Affected by Ring Type Crystalline Defect
2011
Jong Hak Lee
Yu-Jun Lee
Jung Sam Kim
Seo Kyung Jeong
Min-su Kim
Seok Hoon Oh
Kyoung Wook Jung
Soo Yong Son
Chang Reol Kim
Show All
Source
Cite
Save
Citations (0)
Compensating for image placement errors for the HP 3X nm node
2010
Eui Sang Park
Sang Pyo Kim
Tae Joong Ha
Chang Reol Kim
Show All
Source
Cite
Save
Citations (0)
Advanced Mask CD MTT Correction Technique through Improvement of CD Measurement Repeatability of CD SEM
2010
Choong Han Ryu
Ho-Yong Jung
Jea Young Jun
Tae Joong Ha
Chang Reol Kim
Oscar Han
Show All
Source
Cite
Save
Citations (0)
1