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Zhin-Yu Pan
Zhin-Yu Pan
TSMC
Process window
Phase (waves)
Scattering
Wafer
Electronic engineering
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Phase-defocus windows for alternating phase shifting mask
2004
Fu-Jye Liang
Chun-Kuang Chen
Jaw-Jung Shin
Jan-Wen You
Chun-Heng Lin
Zhin-Yu Pan
King-Chang Shu
Tsai-Sheng Gau
Burn Jeng Lin
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Phase-defocus windows for alternating phase shifting mask
2004
Fu-Jye Liang
Chun-Kuang Chen
Jaw-Jung Shin
Jan-Wen You
Chun-Heng Lin
Zhin-Yu Pan
King-Chang Shu
Tsai-Sheng Gau
Burn Jeng Lin
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Citations (0)
1