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Henry A. Luten
Henry A. Luten
Chemical vapor deposition
Ion plating
Hybrid physical-chemical vapor deposition
Plasma processing
Deposition (phase transition)
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A process for chemical vapor deposition in a controlled atmosphere
1999
Andrew T. Hunt
Subramaniam Shanmugham
William D. Danielson
Henry A. Luten
Tzyy Jiuan Hwang
Girish Deshpande
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