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M. Marty
M. Marty
STMicroelectronics
Metallurgy
Passivation
Materials science
Scanning Acoustic Microscopy
Composite material
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An Analysis by Scanning Acoustic Microscopy of the Mechanical Stability of PSG and Si 3 N 4 Passivation Films
1994
MRS Proceedings
P. Scafidi
M. Ignat
P. Mortini
M. Marty
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