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Jeong-Yeol Jang
Jeong-Yeol Jang
Photoresist
Materials science
Photolithography
Ferrite core
Analytical chemistry
4
Papers
4
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0
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Etching characteristics of photoresist and low-k dielectrics by Ar/O2 ferrite-core inductively coupled plasmas
2008
Microelectronic Engineering
Hyoun Woo Kim
Jong Woo Lee
Woon Suk Hwang
Beom Hoan O
Seung-Gol Lee
Se-Geun Park
Joohee Kim
Duck-Jin Chung
Sung-Pil Chang
Young-Chang Joo
Junghoon Joo
Chin-Wook Chung
Wan-jae Park
Chang Jin Kang
Suk-ho Joo
Soon Oh Park
Chung-Gon Yoo
S. Kim
Joung-Ho Lee
Sang-Deog Cho
Dae-Kyu Choi
Keeho Kim
Jeong-Yeol Jang
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Transistor fabrication for sub-90 nm transistor by using trim technology at ArF light source
2006
Jin-Youp Kim
Jeong-Yeol Jang
Jae Hee Kim
Keeho Kim
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Photoresist ashing technology using N 2 /O 2 ferrite-core ICP in the dual damasce
2006
Journal of Materials Science
Hyoun Woo Kim
Ju Hyun Myung
Jong Woo Lee
Hyungsun Kim
Keeho Kim
Jeong-Yeol Jang
Tae-Ho Yoon
S. Kim
Dae-Kyu Choi
Chin-Wook Chung
Geun Young Yeom
Jae Min Myoung
Hyoung June Kim
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Photoresist ashing technology using N2/O2 ferrite-core ICP in the dual damascene process
2006
Journal of Materials Science
Hyoun Woo Kim
Ju Hyun Myung
Jong Woo Lee
Hyungsun Kim
Keeho Kim
Jeong-Yeol Jang
Tae-Ho Yoon
S. Kim
Dae-Kyu Choi
Chin-Wook Chung
Geun Young Yeom
Jae Min Myoung
Hyoung June Kim
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