Old Web
English
Sign In
Acemap
>
authorDetail
>
Hwa-Sung Kim
Hwa-Sung Kim
Samsung
Surface micromachining
Photolithography
Photomask
Engineering
Machining
2
Papers
8
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Analysis of process margin in EUV mask repair with nano-machining
2008
S. Lee
Geun-Bae Kim
Hong-seok Sim
Sang-Hyeon Lee
Hwa-Sung Kim
Jung-Hwan Lee
Hwan Seok Seo
Hak-Seung Han
Seong-Sue Kim
Seong-Yong Moon
Sang Gyun Woo
Ron Bozak
Andrew Dinsdale
Tod Robinson
David W. Lee
Han-Ku Cho
Show All
Source
Cite
Save
Citations (7)
Requirements of nano-machining repair system for 45-nm node
2007
Sang-Hyeon Lee
Hwa-Sung Kim
Hong-Seok Shim
S. Lee
Geun-Bae Kim
Hyuk-Joo Kwon
Sang Gyun Woo
Han-Ku Cho
Show All
Source
Cite
Save
Citations (1)
1