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Takahiro Kohashi

Hitachi

6

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74

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Monolithic integration of a terraced laser diode, photomonitor, and electric circuits on semi-insulating GaAs

1983 CLEO | Conference on Lasers and Electro-Optics
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Azide-phenolic resin photoresists for deep UV lithography

1981 IEEE Transactions on Electron Devices
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Azide Photoresists for Deep U.V. Lithography

1980 Journal of The Electrochemical Society
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Light-sensitive mass and their use

1979
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A method for producing a pattern, in particular a color display screen by the photoresist technique

1973
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