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Kiyoharu Shimoda

University of the Ryukyus

4

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4

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Low-temperature poly-Si TFTs of metal source and drain using blue-laser-diode annealing (BLDA)

2017 Journal of information display
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New Laser Crystallization for LTPS on Panel

2015
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Study on hydrogenation after BLDA in Si TFT with metal source/drain

2015 AM-FPD | International Workshop on Active-Matrix Flatpanel Displays and Devices
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Electrical Characterization of SiO_2 Films Deposited by RF Sputtering at Room Temperature Using O_2/Ar Mixture

2014 Technical report of IEICE. SDM
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