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Emmanuel Scheid

Centre national de la recherche scientifique

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Stress relaxation and dopant activation in nsec laser annealed SiGe

2021 IWJT | International Workshop on Junction Technology
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Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

2021 IITC | International Interconnect Technology Conference
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Characterization method of thermomechanical parameters for microelectronic materials

2002 Microelectronics Reliability
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