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Jianqiang Liu
Jianqiang Liu
Semiconductor Manufacturing International Corporation
Materials science
Composite material
Wafer
Metallurgy
Electromigration
3
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2
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Top metal layer electro plating edge bevel removal improvement study
2016
CSTIC | China Semiconductor Technology International Conference
Jianqiang Liu
Hanming Wu
Xing Zhang
Yi Wang
Chao Tian
Liang Sun
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Study on the influence of contact glue layer growth condition on the quality of gap fill tungsten layer
2016
CSTIC | China Semiconductor Technology International Conference
Jianqiang Liu
Hanming Wu
Xing Zhang
Yi Wang
Zhizhong Lu
Chao Tian
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The novel TiN film prepared by high-performance metal hardmask PVD system for 28/20 nm technology node
2016
CSTIC | China Semiconductor Technology International Conference
Jianqiang Liu
Junbao Wang
Zhimin Bai
Qiang Li
Zhenguo Ma
Bin Deng
Guoqing Qiu
Wei Xia
Hougong Wang
Peijun Ding
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