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Patrick Pons

Hoffmann-La Roche

17

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463

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On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS devices

2011 Nanotechnology
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A novel passive wireless ultrasensitive RF temperature transducer for remote sensing

2010 IMS | International Microwave Symposium
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Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques

2010 Microelectronics Reliability
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A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy

2010 Journal of Micromechanics and Microengineering
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Multi-Physical Characterization of Micro-Contact Materials for MEMS Switches

2010 Holm | Holm Conference on Electrical Contacts
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Self-calibrating sensor pressure.

2008
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Pressure micro-sensor based on Radio-Frequency transducer

2008 IMS | International Microwave Symposium
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Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches

2008 Microelectronics Reliability
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Radio frequency pressure transducer

2007 EuMC | European Microwave Conference
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Characterisation and modelling of the mismatch of TCRs and their effects on the drift of the offset voltage of piezoresistive pressure sensors

2000 Sensors and Actuators A-physical
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Citations (22)