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Kai-Chung Liu
Kai-Chung Liu
TSMC
Optics
Fogging
Resist
Modulation
Materials science
2
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5
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2024
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Global CD uniformity improvement using dose modulation and pattern correction of pattern density-dependent and position-dependent errors
2004
Chia-Jen Chen
Hsin-Chang Lee
Lee-Chih Yeh
Kai-Chung Liu
Ta-Cheng Lien
Yi-Chun Chuo
Hung-Chang Hsieh
Burn Jeng Lin
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