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C. Diekmann
C. Diekmann
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Analytical chemistry
Megabit
Dry etching
Oxide
Logic gate
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A Self-aligned Isolation-oxide Process Before Gate Formation for Enhanced Packing Density of Megabit DRAMs
1989
ESSDERC | European Solid-State Device Research Conference
P. Kuepper
Berit Hasler
S. Roehl
T. Bolze
C. Diekmann
H.G. Mohr
W. Starflinger
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