Old Web

English

Sign In

Acemap > authorDetail > Annalisa Pepe

author-photo

Annalisa Pepe

STMicroelectronics

Process window
Optics
Semiconductor device fabrication
Lithography
Throughput

3

Papers

4

Citations

0

KQI

Citation Trend

Filter By

Interval: 1900~2024

1900

2024

Author

Papers (2) Sort By

Default
Most Recent
Most Early
Most Citation

No data

Journal Conference Others

Customized illumination schemes for critical layers of 90-nm node dense memory devices in ArF lithography: comparison between simulation and experimental results

2004
Show All
- Source
- Cite
- Save
Citations (1)
Full-chip implementation of IDEALsmile on 90nm node devices with ArF lithography

2004 MNC | International Microprocesses and Nanotechnology Conference
Show All
- Source
- Cite
- Save
Citations (3)

1

Email Address

acemap@cs.sjtu.edu.cn

CCF Conference Analysis

Map Galaxy

Academic Report

What's New

© Copyright 2015-2020 Acemap, Inc. Shanghai Jiao Tong University.

沪ICP备18028330号