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Byoung-hun Lee
Byoung-hun Lee
Samsung
Wafer fabrication
Polishing
Electronic engineering
Silicon on insulator
Chemical-mechanical planarization
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A novel CMP method for cost-effective bonded SOI wafer fabrication
1995
SOI | International SOI Conference
Byoung-hun Lee
C.J. Kang
J.H. Lee
Sunil Yu
Kyungwook Lee
Kyu-Charn Park
Tae-Hun Shim
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