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San L. Leong
San L. Leong
Slurry
Composite material
Materials science
electrical performance
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Characterization of Newly Developed CuCMP Liner Slurry for Improved Electrical Performance
2009
San L. Leong
Benfu Lin
Xianbin Wang
PohPeng Yap
Feng Zhao
Mei Sheng Zhou
Albert Lau
Jason J. Keleher
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