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S.-Y. Lee
S.-Y. Lee
Applied Materials
Oxygen
Chemical vapor deposition
Electrical resistance and conductance
Analytical chemistry
Electromigration
1
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15
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Co capping layers for Cu/low-k interconnects
2012
Microelectronic Engineering
Chih-Chao Yang
Philip L. Flaitz
B. Li
Fen Chen
Cathryn Christiansen
S.-Y. Lee
Paul F. Ma
Daniel C. Edelstein
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Citations (15)
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