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J. Biersack
J. Biersack
IBM
Radiochemistry
Polycrystalline silicon
Boron
Doping
Impurity
1
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27
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The behavior of boron (also arsenic) in bilayers of polycrystalline silicon and tungsten disilicide
1982
Journal of Applied Physics
F. Jahnel
J. Biersack
Billy Lee Crowder
F. M. d'Heurle
D. Fink
R.D. Isaac
C. J. Lucchese
C. S. Petersson
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Citations (27)
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