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T.D Schemmel
T.D Schemmel
Deposition (law)
Process optimization
Analytical chemistry
X-ray photoelectron spectroscopy
Stoichiometry
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24
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Process for high rate deposition of Al2O3
1989
Thin Solid Films
T.D Schemmel
R. L. Cunningham
H. Randhawa
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Citations (24)
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