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Jiamutian Zhuo
Jiamutian Zhuo
Substrate (chemistry)
Control theory
Materials science
Physics
Control theory
5
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The substrate processing apparatus, a substrate processing system, and method of detecting abnormality of the transport container
2013
senchuanshengyang
Zhongyuxiong Xu
Jiamutian Zhuo
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Transfer apparatus and transfer method
2012
Zhunzhifu Mu
shiyeguanghui
zhongyezhenger
Dubiangang Shi
Tiankangdian Feng
Jiamutian Zhuo
fantianchengzhao
yuantianhaoshu
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The substrate processing system, the substrate transfer method, and a computer program storage medium
2012
Jiamutian Zhuo
Zhongyuantianya Hong
Mushanxiu He
fantianchengzhao
Tianliang Gong
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Holding member shape determination device and method and a substrate processing apparatus
2011
weiyuanyingshu
Zhunzhifu Mu
Jiamutian Zhuo
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基片传递设备,基片处理系统,和基片传递方法
2007
murata akira
Jiamutian Zhuo
daomuyuyi
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