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D. Sieloff
D. Sieloff
IBM
Ion implantation
Doping
Dislocation
Crystallography
Silicon
2
Papers
24
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Studies of point defect/dislocation loop interaction processes in silicon
1995
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
K. S. Jones
H. G. Robinson
J. K. Listebarger
Jia’er Chen
J. Liu
B. Herner
H. Park
Mark E. Law
D. Sieloff
J. Slinkman
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Citations (16)
Study of end of range loop interactions with B+ implant damage using a boron doped diffusion layer
1995
Journal of Applied Physics
J. K. Listebarger
H.G. Robinson
K. S. Jones
Mark E. Law
D. Sieloff
J. Slinkman
T.O. Sedgwick
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Citations (8)
1