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C. Trouiller
C. Trouiller
Nuclear magnetic resonance
Experimental data
Permittivity
Ultraviolet
Dielectric
2
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5
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Lanthanum quantification for optimization of advanced high-k/metal gate stacks using low energy electron x-ray emission spectrometry
2015
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
E. Martinez
F. Bertin
C. Trouiller
Pierre Caubet
M-P. Moret
A.-S. Robbes
K.-A. Bui-T Meura
O. Dulac
N. Morel
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Modelization of structural changes in ultra low k materials during ultraviolet cure
2013
Journal of Applied Physics
G Imbert
D. Vo-Than
C. Trouiller
F. Lorut
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Citations (5)
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