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R. Kolenkow
R. Kolenkow
Engineering
Engineering ethics
Physical science
Nanotechnology
Manufacturing engineering
2
Papers
10
Citations
0.01
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CHEMICAL-MECHANICAL WAFER POLISHING AND PLANARIZATION IN BATCH SYSTEMS
1992
Solid State Technology
R. Kolenkow
R. Nagahara
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Citations (7)
Physical Science Today
1973
I. Assimov
A. Baker
M. E. Bickford
G. Burbidge
G. Choppin
M. Chriss
D. Eisenberg
J. Fowler
H. Gray
A. Holden
Lester Ingber
R. Kolenkow
Chun Lee
P. Lonsdale
G. Morgan
M. Rotenberg
M. Sands
A. Schawlow
Victor F. Weisskopf
G. Wetherill
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Citations (3)
1