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Teruaki Yamamoto
Teruaki Yamamoto
Toshiba
Manufacturing engineering
Engineering drawing
Photolithography
Lithography
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New mask blank handling system for the advanced electron-beam writer
1999
Shusuke Yoshitake
Kenji Ooki
Ryoichi Hirano
Toru Tojo
Yoji Ogawa
Katsuhito Ogura
Teruaki Yamamoto
Masaki Toriumi
Yoshiaki Tada
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