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Joshua Chiu-Wing Tsui
Joshua Chiu-Wing Tsui
Materials science
Acrylate
Polymer
Dielectric
Polyethylene glycol
3
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Elektrostatische Halteplatte und Herstellungsverfahren
1996
Kenneth S Collins
Joshua Chiu-Wing Tsui
Douglas A. Buchberger
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Polymer impregnated electrostatic chuck and manufacture thereof
1996
Douglas A. Buchberger
Kenneth S Collins
Joshua Chiu-Wing Tsui
esu . korinzu keniisu
tui josyuaatiuuuin
buttibaagaa dagurasu
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