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Kenneth Uhnak
Kenneth Uhnak
Substrate (chemistry)
Polymer
Nanotechnology
Lithography
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Optimizing a DUV positive resist for metal layers
1999
Sanjay Malik
Brian Maxwell
Anna Gandolfi
Alberto Ornaghi
Allyn Whewell
Kenneth Uhnak
Stefano Volpi
Veerle Van Driessche
Thomas R. Sarubbi
Steven G. Hansen
Murrae J. Bowden
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