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S. V. Zakhvalinsky
S. V. Zakhvalinsky
Small-angle X-ray scattering
Atomic force microscopy
Silicon nitride
Thin film
Cavity magnetron
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Features of Structure of Magnetron Films Si3N4 and SiC
2013
A. P. Kuzmenko
A. S. Chekadanov
S. V. Zakhvalinsky
E. A. Pilyuk
M.B. Dobromyslov
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