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Polly Yi Ting Chen
Polly Yi Ting Chen
Materials science
Nanotechnology
Implant
Composite material
Aqueous solution
2
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2
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Versatile Aqueous Chemistry for Selective Ru or WNx Etch and Implant BARC Removal in 5- and 3-nm Applications
2018
Solid State Phenomena
Chien-Pin Sherman Hsu
Polly Yi Ting Chen
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Citations (2)
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