Old Web
English
Sign In
Acemap
>
authorDetail
>
P.-Y. Friot
P.-Y. Friot
Dow Chemical Company
Surface roughness
Analytical chemistry
Microstructure
Surface finish
Materials science
1
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Chemical/mechanical balance management through pad microstructure in CMP
2017
Microelectronic Engineering
R. Yim
C. Perrot
V. Balan
P.-Y. Friot
B. Qian
N. Chiou
G Jacob
E. Gourvest
F. Salvatore
S. Valette
Show All
Source
Cite
Save
Citations (1)
1