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Georgy I. Tychonchuk
Georgy I. Tychonchuk
Spherical aberration
Adaptive optics
Photolithography
Zernike polynomials
Distortion
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Principles and software for photolithographic optical system alignment and tolerancing
1999
Sergey A. Rodionov
Nikolay B. Voznesensky
Nadezhda D. Tolstoba
Dmitry A. Gavrilin
Georgy I. Tychonchuk
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