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Sandrine Arnaud
Sandrine Arnaud
Materials science
Silicon
Grazing-incidence small-angle scattering
Annealing (metallurgy)
Copolymer
2
Papers
15
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Sub-10 nm plasma nanopatterning of InGaAs with nearly vertical and smooth sidewalls for advanced n-fin field effect transistors on silicon
2017
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Fares Chouchane
B. Salem
M. Martin
Erwine Pargon
F. Bassani
Sandrine Arnaud
Sylvain David
R. Alcotte
Sébastien Labau
Jérémy Moeyart
Thierry Baron
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Citations (2)
Sub-10 nm Silicon Nanopillar Fabrication Using Fast and Brushless Thermal Assembly of PS-b-PDMS Diblock Copolymer.
2016
ACS Applied Materials & Interfaces
Jérôme Garnier
Javier Arias-Zapata
Olivier Marconot
Sandrine Arnaud
Sophie Böhme
Cécile Girardot
D. Buttard
M. Zelsmann
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Citations (13)
1