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Mitsuhiro Togashi
Mitsuhiro Togashi
Samsung
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Semiconductor device
Molar absorptivity
Optics
Computer simulation
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A study of optical penetration into the micro-periodic structure of semiconductor devices
2012
Proceedings of SPIE
Harutaka Sekiya
Mitsuhiro Togashi
Mitsunori Numata
Yasutsugu Usami
Suejin Cho
Yong-Deok Jeong
Yusin Yang
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