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Terumasa Hirano
Terumasa Hirano
Hoya Corporation
Chemical structure
Lithography
Nanotechnology
Thin-film transistor
Photomask
2
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1
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Growth mechanism and inhibition technologies of a contamination on the surface of photomask for longtime LCD-TFT lithography process
2011
Makoto Murai
Masayoshi Tsuchiya
Hiroyuki Shinchi
Terumasa Hirano
Shintaro Kitajima
Yasushi Kaneko
Takahisa Kimoto
Shigeki Takayama
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多階調フォトマスクの製造方法、多階調フォトマスク、及びパターン転写方法
2009
Terumasa Hirano
Hiroyuki Shinchi
terumasa heiya
hiroyuki sinti
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