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Assim Elazami
Assim Elazami
KLA-Tencor
Metrology
Ellipsometry
Materials science
Optics
Analytical chemistry
4
Papers
12
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Spectroscopic ellipsometry-based scatterometry for depth and linewidth measurements of polysilicon-filled deep trenches
2004
Thomas Hingst
Manfred Moert
Peter Reinig
Elke Backen
Rene Dost
Peter Weidner
Ted Dziura
Assim Elazami
Regina Freed
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Spectroscopic ellipsometry for lithography front-end level CD control: a complete analysis for production integration
2003
David Herisson
DaniEle Neira
Cyril Fernand
Philippe Thony
Daniel Henry
Stephanie Kremer
Marco Polli
Marco Guevremont
Assim Elazami
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Spectroscopic Ellipsometry based Scatterometry enabling 193nm Litho and Etch process control for the 110nm technology node and beyond
2003
Thomas Hingst
Thomas Marschner
Manfred Moert
Jan Homilius
Marco Guevremont
Assim Elazami
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Citations (5)
A Critical Review of "Contractor Performance: How Good AreContingent Workers at the Professional Level" - Elazami
1998
Assim Elazami
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