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Aiko Uhlemann
Aiko Uhlemann
Particle
Vacuum chamber
Coating
Substrate (chemistry)
Perpendicular
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2024
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An arrangement for coating substrates
2009
Faber Jörg
Gerd Pollack
Sven Barth
Christoph Steuer
Uwe Kralapp
Aiko Uhlemann
Martin Sens
Hendrik Hummel
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